Introduction to focused ion beam nanometrology

• Tác giả: David C Cox
• Ngôn ngữ: eng
• ISBN-13: 978-1681740201
• ISBN-13: 978-1681740843
• ISBN-13: 978-1681742120
• Ký hiệu phân loại: 620.50287 Nanotechnology
• Thông tin xuất bản: Bristol [England] (Temple Circus, Temple Way, Bristol BS1 6HG, UK) : IOP Publishing, 2015
• Mô tả vật lý: 1 online resource (various pagings) : , illustrations (some color).
• Bộ sưu tập: Tài liệu truy cập mở
• ID: 161187
• Chủ đề: 1. Nanostructured materials--Measurement; 2. Engineering Measurement and calibration; 3. TECHNOLOGY & ENGINEERING / Measurement

Includes bibliographical references.

Tóm tắt

This book describes modern focused ion beam microscopes and techniques and how they can be used to aid materials metrology and as tools for the fabrication of devices that in turn are used in many other aspects of fundamental metrology. Beginning with a description of the currently available instruments including the new addition to the field of plasma-based sources, it then gives an overview of ion solid interactions and how the different types of instrument can be applied.
- Chapter s then describe how these machines can be applied to the field of materials science and device fabrication giving examples of recent and current activity in both these areas.